The Levitronix® BPS pumps are designed for ultrapure processing of delicate fluids in microelectronic wet applications. Based on active magnetic levitation, the pump impeller is suspended and driven by the motor’s magnetic field. The wide gap ensures there is no mechanical contact between moving parts and, therefore, no wear. There are no bearings to wear out or seals to break down. The impeller and casing are both made from chemical-resistant high purity fluoropolymer resins. Fluid flow rate and pressure are precisely controlled by electronically regulating the impeller speed.
The Levitronix® BPS-i100 is designed for ultrapure processing of delicate fluids in microelectronic wet applications. Based on active magnetic levitation, the pump impeller is suspended and driven by the motor’s magnetic field. The wide gap ensures there is no mechanical contact between moving parts and, therefore, no wear. There are no bearings to wear out or seals to break down.
The impeller and casing are both made from chemical-resistant high purity fluoropolymer resins. Fluid flow rate and pressure are precisely controlled by electronically regulating the impeller speed. The motor and pump controller are integrated into the driver housing resulting in a significantly reduced footprint.
- Proven by industry experience – The purest pump within semiconductor manufacturing (and beyond)!
Since there is no mechanical coupling between the impeller and the pump head casing, there is no wear and therefore virtually no particle generation. - Significantly lower than air-operated pumps
The wet surface area of a Levitronix® pump is several times smaller than that of a pneumatic pump of comparable hydraulic power. - Ideal for Slurry and delicate plating liquids
The absence of mechanical bearings, narrow gaps, fissures, and dead zones combined with the smooth wetted plastic surfaces allow for the gentle processing of sensitive liquids. - Improved filter performance
The open pump head design, high flow resolution, centrifugal pump principle, and the absence of valves lead to a pulsation-free flow, thereby improving the performance of ultrapure filters. - No more flow throttling – highly accurate flow and pressure
The Levitronix® pump allows for precise control of flow or pressure over a wide operating range due to its variable speed and high resolution. - Extremely high reliability
There are no bearings to wear out or seals to break down, increasing equipment uptime, extending the life of your process equipment, and reducing maintenance costs. - Substantially smaller than air operated pumps
The highly integrated design of the pump and motor combined with the absence of a mechanical bearing greatly reduce the footprint and allow for installation in confined spaces. - From a few mlpm up to max flow
BPS pumps accurately control and maintain a smooth flow from just a few mlpm up to the maximum flow rate, giving them the highest turndown ratio among competitive pumps. - Create a feedback loop
Integrate a flow or pressure sensor into your pump system and create a feedback loop to allow automatic control of your desired process conditions.
With ever-increasing miniaturization and complexity, process requirements in microelectronics wet applications have become more and more stringent. A plethora of different media is necessary to cover the different processes in areas such as semiconductor manufacturing, photovoltaics, or LED. Ultrapure, safe, and reliable delivery of critical process media is of paramount importance.
Chemical Mechanical Planarization (CMP) must continuously improve to meet the stringent requirements of next generation IC device manufacturing. The consistency of the slurry is essential to achieve high process repeatability and uniformity. Compared to Levitronix® pumps, pneumatic pumps can cause shear stress due to check valves and other components. Shear stress in pumps can cause slurry agglomeration. Agglomerated slurry particles can lead to micro scratches, which cause wafer defectivity in CMP. Furthermore, Slurry agglomerates result in quick filter clogging, leading to increased maintenance costs.
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