The Levitronix® BPS pumps are designed for ultrapure processing of delicate fluids in microelectronics and semiconductor wet applications. Based on active magnetic levitation, the pump impeller is suspended and driven by the motor’s magnetic field. The wide gap ensures there is no mechanical contact between moving parts and, therefore, no wear. There are no bearings to wear out or seals to break down.
The impeller and casing are both made from chemical-resistant high purity fluoropolymer resins. Fluid flow rate and pressure are precisely controlled by electronically regulating the impeller speed.
With over 25 years of experience and over 100 000 products sold, Levitronix® is the worldwide leader in bearingless motor technology. We understand how this unique technology can enhance your specific product or process in terms of performance, lifetime, and usability.
Levitronix® is the worldwide leader in magnetically levitated bearingless motor technology, specializing in supplying process equipment for Microelectronics, Life Science, and Industrial Applications. Our products range from pump systems, mixers, and blowers to flow sensors and viscometers.
The Levitronix® bearingless motor technology is characterized by several outstanding features such as highest purity, wear-free operation, and high power density. Based on active magnetic levitation (MagLev), there is no contact between the rotating and stationary parts. Therefore no lubricant is required.
Bearingless motor technologies are applied in a variety of industries. In the semiconductor industry, bearingless motors are applied in different products such as pumps, mixers, fans, or wafer rotation systems since the lack of physical contact ensures the highest purity. Further potential applications include pumps, mixers, bioreactors, centrifuges, and viscometers for the biopharmaceutical industry.
Levitronix® pump systems are designed for demanding bulk chemical delivery applications where ultrapure and safe processing will ensure the highest yield.
Managing process integrity starts with the liquids that come in direct contact with the wafer. With ever-increasing miniaturization, the requirements for the purity of bulk chemicals as well as their supply systems are dramatic.
Compared to pumps, pressurized vessels bear a water hammer risk that can cause particle release from filters and safety concerns. Among all pump systems for semiconductor manufacturing, Levitronix® pumps have become the industry standard for ultrapure wet applications as the absence of a mechanical bearing leads to virtually no particle generation.
Levitronix® pump systems are designed for demanding bulk chemical delivery applications where ultrapure and safe processing will ensure the highest yield.
