Semiconductor Fabrication Industry - DEBEM AODD

Debem Srl AODD & Magnetic Drive pumps are best suited for critical semiconductor applications. The semiconductor industry demands precision, reliability, and resistance to extreme chemical environments. Air-Operated Double-Diaphragm (AODD) pumps have become a crucial component in semiconductor manufacturing due to their ability to handle highly corrosive fluids while ensuring safe and efficient operations.

Debem Srl AODD pumps are uniquely suited for semiconductor applications as :

  • Chemical Compatibility – Made from corrosion-resistant materials such as PTFE and PVDF, AODD pumps can handle aggressive acids, solvents, and slurries without degradation.

  • Leak-Free Performance – Their unique design minimizes the risk of fluid leaks, preventing contamination in ultra-clean environments.
  • Gentle Fluid Handling – The non-shearing action ensures the safe transfer of delicate chemical solutions without affecting their composition.
  • Self-Priming & Dry-Run Capabilities – AODD pumps can operate under varying conditions without damage, making them ideal for continuous semiconductor processing.
  • Explosion-Proof Operation – Since they are air-powered, they eliminate risks associated with electrical components in volatile chemical environments.


Key Applications of AODD Pumps in Semiconductor Manufacturing

  1. Chemical Delivery Systems

    • Transporting ultra-pure and aggressive chemicals such as sulfuric acid, hydrofluoric acid, and nitric acid used in wafer fabrication and etching processes.
  2. Slurry & CMP (Chemical Mechanical Planarization) Processing
    • Handling abrasive slurries used for polishing silicon wafers while maintaining flow consistency and preventing particle agglomeration.
  3. Wastewater & Chemical Disposal
    • Safely transferring spent chemicals and wastewater while ensuring compliance with environmental regulations.
  4. Etching & Cleaning Processes
    • Providing precise and contamination-free fluid transfer in wet etching and wafer cleaning operations.
  5. High-Purity DI (Deionized) Water Handling

    • Ensuring contamination-free circulation of ultra-pure water required for rinsing and cleaning wafers.


Why Choose Debem AODD Pumps?

Debem AODD pumps are engineered specifically for semiconductor applications, offering superior chemical resistance, durability, and reliability.

Available in PVDF, PP, PTFE these pumps are compatible with most corrosive fluids. Ability to withstand high pressures upto 7-8 bar and high temperatures make DEBEM pumps, best pumps for semiconductor industry. Our team at Fine Flow Tech can help you select the best suited pumps for your application from a range of sizes and configurations. We also provide tailored solutions that meet the stringent demands of modern semiconductor manufacturing.
Semicon pumps for chemical and wet process